Simulation of Curl Compensation in MEMS Micromirror

MEMS scanning micromirror for optical coherence tomography.

This paper describes an endoscopic-inspired imaging system employing a micro-electromechanical system (MEMS) micromirror scanner to achieve beam scanning for optical coherence tomography (OCT) imaging. Miniaturization of a scanning mirror using MEMS technology can allow a fully functional imaging probe to be contained in a package sufficiently small for utilization in a working channel of a sta...

MEMS WDM Routers Using Analog Micromirror Arrays

There have been increasing interests in programmable optical add-drop multiplexers (OADM) and wavelength-selective switches in wavelength-division-multiplexed (WDM) networks. Conventional OADM has one input and one output channels, in addition to an add and a drop channels [l]. It is also called 1x1 OADM. Dynamic OADM with more than one output ports offers greater flexibility and functionality ...

SOI-CMOS-MEMS Electrothermal Micromirror Arrays

Electrostatically Actuated 2-dimensional Mems Micromirror

Electrostatically actuated Micro-Electro-MechanicalSystems (MEMS) based micromirror is a fundamental building block for a variety of optical network applications, such as optical wavelength-selective switching, add/drop multiplexing, and optical cross-connecting. The design, analysis and testing of a 2-Dimensional (2D) electrostatically actuated torsional MEMS micromirror is presented in this p...

Design and Simulation of MEMS Based Electrothermal Micromirror for 3D Spatial Movement

In this paper, we have addressed the design and simulation results of an electrothermally driven micromirror that is capable of producing in-plane as well as out-ofplane displacements. The coupled multiphysics simulation and study of the electrical, thermal and most importantly the mechanical behavior of the mirror system is done using COMSOL Multiphysics. The device has an in-plane displacemen...